IRESS Controller
The problem of finding a fast, repeatable, commercially viable method of depositing many oxides, nitrides, and carbides has been solved. With IRESS, RSI now offers a reactive sputtering controller that will enable the user to reactively deposit many compound films from an elemental target, allowing the process to achieve increased flexibility, repeatability, reliability, and throughput. By precisely controlling the partial pressure of the reactive gas through the application of nested control loops, IRESS helps the user to control such variables as hardness, color, optical constants, electrical, and thermal properties. Repeatability is ensured with proprietary calibration routines including hysteresis curve generation, as well as techniques to eliminate long term control signal drift. The IRESS system is based on patented technology and RSI’s 30+ years of experience in the industry. The IRESS is designed to be installed on virtually any deposition system in either a stand-alone mode (with no modifications to the host software) or it can be fully integrated into the OEM system software.
Key Benefits
Improved film repeatability
High rate reactive sputter deposition
Increased throughput
Freedom to change film composition by adjusting partial pressure
Multi-gas reactive deposition, i.e., oxynitrides
Turnkey solution
No more flow control headaches!
Key Applications
Tool coatings
Decorative coatings
Protective oxides
Optical coatings
Barrier layers
Resistive films
Tribological coatings